The newly introduced UA3P-L measures the vertical wall surfaces of objects and the interior surface of micron-level holes. Applications requiring High Aspect Ratio Metrology (HARM), such as fuel injector orifices, micro-sized gears, and semiconductor feature patterns can all benefit from this profilometer.
The UA3P-L is constructed with the same high-accuracy AFM technology as the Panasonic's other UA3P profilometers. Our unique approach uses atomic force probe technology in the stylus and HeNe laser-based interferometric XYZ axis positioning.
Features & Benefits
- High-accuracy resin part measurement without contact deformation
- Vertical and horizontal measurements with same probe
- Robust system for use on the production floor