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UA3P-L Profilometer

The newly introduced UA3P-L measures the vertical wall surfaces of objects and the interior surface of micron-level holes. Applications requiring High Aspect Ratio Metrology (HARM), such as fuel injector orifices, micro-sized gears, and semiconductor feature patterns can all benefit from this profilometer.

The UA3P-L is constructed with the same high-accuracy AFM technology as the Panasonic's other UA3P profilometers. Our unique approach uses atomic force probe technology in the stylus and HeNe laser-based interferometric XYZ axis positioning.

Features & Benefits

  • High-accuracy resin part measurement without contact deformation
  • Vertical and horizontal measurements with same probe
  • Robust system for use on the production floor
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